1.DESKTOP DRAWER TRAY DESIGN
2.LOAD TRAY CAPACITY:8 INCH WAFER 1PCS/6 INCH WAFER 1PCS
3.254NM NON-CONTACT UV EXPOSURE,NO ARC DAMAGE
4.OZONEFREE LAMP DESIGN
5.ANTI UV LEAKAGE/DOOR INTERLOCK SAFETY DESIGN
6.EASY OPERATION/LAMP REPLACEMENT DESIGN"
| ITEM | SPECIFICATION |
| WAFER SIZE | 12/8 INCH |
| M/C SIZE | 60x80x60 cm (MxDxH) |
| M/C SIZE | AC 110V 60HZ 1 PHASE OR 220V 50HZ 1PHASE |
| LAMP TYPE/POWER | GRID TYPE MERCURY LAMP/350 W |
| PROCESS WAVELENGTH | 254 NM |
| SAFETY DESIGN | ANTI UV LEAKAGE BOX |
| SAFETY DESIGN | DOOR OPEN INTERLOCK |
| SAFETY DESIGN | OVER TEMPERATYRE AUTO SHUT DOWN |
.jpg)
