●High heat resistance
Micro pore material is made from high temperature sintering, and it has the characteristics of high temperature resistance itself.
● Chemical corrosion resistance
The main manufacturing materials are inert raw materials and weak chemical reactions such as acid and alkali
● High insulation
Insulating material and has the characteristics of dissipated electrostatic
● Light weight
The internal structure of the material is uniform, with a specific gravity of 2.6 to 3.8; completely sinter
| Partial regional adsorption | Uniform distribution of adsorption force |
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1.Pore size:2~40μm 2.Porosity:40~60% |
1.High flatness requirements for applications,such as film and 2.Low induction rate, can prevent staticelectricity,eliminate 3.Low – resistance above 10-6Ω |
| Applications | Characteristic |
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1.Semiconductor wafer chuck, Microchip device industry. |
1.Frictional force |
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2.TFT-LCD、LED equipment industry. |
2.Wear restistance |
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3.Exposing machine、Glass cutting machine、Air damper transportation of glass substrate. |
3.Good plane accuracy |
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4.PCB equipment industry. |
4.High insulation |
| 5.Robotic arm transportation industry. |
| Item | Specification |
| Pore size | 2μm〜40μm |
| Porosity | 40%〜60% |
| Flatness | 0.01~0.05mm ( by Dimension) |
| Exterior color | Black/White |
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★Customization: different sizes and shape suckers can be made according to customer needs |
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