Porous Ceramic Vacuum Chuck (Chuck Table) is specifically designed for high-efficiency industrial applications, offering excellent heat resistance to operate stably in extreme high-temperature environments. Made from fine-pore material through high-temperature sintering, it has excellent chemical corrosion resistance, capable of withstanding acids, alkalis, and other chemical substances. The ceramic hardness provides outstanding abrasion resistance, ensuring long-term durability without wear. The chuck material has high insulation properties, effectively dissipating static electricity, and is dust-free, maintaining a clean working environment. With its lightweight design and uniform pore structure, it excels in vacuum adsorption, making it widely used in precision equipment Chuck Tables to improve work efficiency and accuracy.
| Partial regional adsorption | Uniform distribution of adsorption force |
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1.Pore size:2~50μm 2.Porosity:40%±5% |
1.High flatness requirements for applications such as film and thin material processing. 2.Low induction rate, effectively preventing static electricity and eliminating static charges produced by the workpiece. 3.Surface Impedance: 10-6~10-9 ohm/sq |
| Applications | Characteristic |
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1. Semiconductor wafer chuck, specially designed for small chip equipment, provides stable suction power to ensure high performance and accuracy in precision processes. |
High Heat Resistance: The fine-pored material is made from high-temperature sintered substances, which inherently possess high heat resistance. |
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2. AOI inspection system, widely used for defect detection in glass, wafers, and PCB soft boards, enhances inspection accuracy and efficiency on production lines, effectively ensuring product quality. |
♦ Chemical Corrosion Resistance: The main manufacturing material is an inert substance, which has low reactivity to acids, bases, and other chemicals. |
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3. Printed circuit board equipment, offering precision process solutions to meet various PCB design requirements, enhancing production efficiency and product quality. |
♦ Wear Resistance: It possesses the hardness of ceramic materials, offering excellent wear resistance and long-term durability. |
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4. Exposure machines, glass cutting machines, and glass substrate air flotation handling systems, providing precise and efficient processing and handling solutions, enhancing production efficiency and accuracy in the manufacturing process. |
♦ High Insulation: It is an insulating material with the ability to dissipate static electricity. |
| 5. Robotic arm handling equipment, designed for high-efficiency automated production, providing precise handling solutions to improve production line efficiency, widely used in manufacturing, assembly, and other fields. | ♦ Lightweight and Dust-Free:
The internal structure of the material is uniformly porous, with a specific gravity coefficient of 2.6〜3.8; it is fully sintered and does not produce dust. |
| Item | Specification |
| Pore size | 2μm〜50μm |
| Porosity | 40%±5% |
| Flatness | 3um~5um |
| Exterior color | Black/White |
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★Customization: different sizes and shape suckers can be made according to customer needs |
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