1.254/185nm UV EXPOSURE,NO ARC DAMAGE,BEST FOR ULTRA FINE IC DEVICES.
2.INTENSE 254nm/185nm RADIATION WITH HIGH CONCENTRAIION OZONE
PROCESSING GAS.
3. MIT LONG LIFE COLD CATHODE MECURY LAMP.
4. UNIQUE LAMP COOLING DESIGN,OPTIMIZED LAMP PERFORMANCE.
5. CHAMBER OPEN SAFETY INTERLOCK.
6. NITROGEN PURGE/COOLING DESIGN.
7. EASY OPERATION / LAMP REPLACEMENT DESIGN.
8. HEATOR STAGE(OPTION)
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|
ITEM |
SPECIFICATION |
| WAFER SIZE | 12/8/6 INCH |
|
M/C SIZE |
600X550X780cm(WXDXH) |
|
POWER REQUIRED |
220V /1PHASE/20A |
|
UTILITY REQUIRED |
OXYGEN 50SLM / NITROGEN 50SLM /EXHAUST 80CMM |
|
HEATING STAGE/TEMP. |
OPTION /300℃ |
|
LAMP TYPE |
LOW PRESSURE MECURY LAMP |
|
MAIN WAVELENGTH |
254/185 nm |
|
SAFETY DESIGN 1 |
CHAMBER TEMPERATURE ALARM |
|
SAFETY DESIGN 2 |
CHAMBER OPEN INTERLOCK |
1.WAFER SURFACE DRY CLEAN/MODIFICATION
2.SURFACE ORGANIC CONTAMINATION REMOVAL
3.PTOTORESIST REMOVAL
4.SURFACE WETTABILITY IMPROVEMENT
