Products > TP Sensor Process > UV Clean Machine
UV Clean Machine
MUS-39   UV Clean Machine
Features
  • Collocate Mactech or Japan made USC head
  • Sensor for investigation, prevent HEAD or Stage from scretch and damage
  • Gap between HEAD and substrate can be tunned, suitable for any thickness
  • Cooling route can be set with stage for reducing deformation casued in exposure
Summary

Suitable for pre-process of lamination, exposure, etching and checking, anti-particle on substrate, improve yield.
 

 

Specification
Machine Dimension 2210(L)x1400(W)x2250(H)mm
Machine Weight 1000kg
Operation Method PLC control system, human-machine iteraction
Product Size 750(L)x650(W)mm ,T=0.33~1.1mm
Opeartion Heigh 1160±20mm (from ground to the height of product)
Stage Movement Rate 10~200mm/s (Human-machine control)