Responding to various microscopic objects, such as objects of complex shape with interval holes which are difficult to clean, by using vacuum and steam principle, and applying detergent (HFE-7200) to clean. Unable to clean chips with coating or organic substance. ．An 10.1 inch color LCD as touch panel, increasing    the ease of use by the machine operators. ．Clean by supersonic wave combined with detergent. ．Continuous cleaning once completed , facilitate the    operation and production capacity. ．Machine structure adopts high cleanliness design,    improving product yield rat

Dimensions	1300(L)×1300(W)×1910(H)mm
Weight	About 800 kg
Method of operation	System of PC control. Touch Panel fitted with 10.1”color screen.
Power	3ψAC220V 50/60Hz
Air Pressure	Air 5~7 kg/c㎡
Requirement of cooling water	1  kg/c㎡、40 L/min、15 ℃
Requirement of Nitrogen	250 L/min、2  kg/c㎡
Class of cleaning	Class 1000
Cycle time	30 min/次
Size of cleaning tank	ψ300×H240mm (Can accommodate 7 X 2-levels of cleaning trays)
Equipments of cleaning	Supersonic, steamer and vacuum pump
Detergent	HFE-7200